Перегляд за автором "Kashaba, A.Y."

Сортувати за: Порядок: Результатів:

  • Improvement of penning ion sources 
    Bizyukov, A.A.; Bobkov, Vl.V.; Kashaba, A.Y.; Sereda, K.N. (Вопросы атомной науки и техники, 2000)
    It is shown that the loss of a longitudinal symmetry of magnetic field distribution in respect to the centre of the Penning discharge system causes change of electrostatic potential distribution in the discharge gap leads ...
  • Large-area surface wave plasma source 
    Azarenkov, N.A.; Bizyukov, A.A.; Sereda, K.N.; Tseluyko, A.Ph.; Yunakov, N.N.; Gapon, A.V.; Kashaba, A.Y. (Вопросы атомной науки и техники, 2002)
    A surface wave plasma source for the production of a large-diameter, high electron density and low electron temperature plasma at low pressure without using a magnetic field for plasma processing and thin film preparation ...
  • Solid ion accelerator based on magnetron sputtering discharge 
    Azarenkov, N.A.; Bizyukov, I.A.; Kashaba, A.Y.; Sereda, K.N. (Вопросы атомной науки и техники, 2004)
    A new solid ion accelerator based on magnetron sputtering discharge is described. The ions of working gas are used to bombard and sputter a cylindrical target made of metal or dielectric material. The sputtered atoms can ...
  • Study of mechanism of anode layer instability of the discharge in transverse magnetic field 
    Abolmasov, S.N.; Bizyukov, A.A.; Kashaba, A.Y.; Sereda, K.N. (Вопросы атомной науки и техники, 2000)
    The macroscopic stability of anode layer of low pressure discharge in cross magnetic field was theoretically and experimental(ly) investigated. It is shown that with injection of primary electrons into cathode area the ...
  • Surface wave plasma source for broad-beam ion and electron production 
    Azarenkov, N.A.; Bizyukov, A.A.; Gapon, A.V.; Olefir, V.P.; Kashaba, A.Y.; Sereda, K.N.; Tarasov, I.K. (Вопросы атомной науки и техники, 2004)
    The new type of multipurpose plasma source based on the surface wave sustained discharge is presented. The plasma in the source is generated by the RF surface wave discharge excited by the antenna system placed inside ...
  • TiN coating etching from a surface of the instrument in beam-plasma system 
    Bizyukov, A.A.; Kashaba, A.Y.; Sereda, K.N.; Sleptsov, V.V.; Danziger, М.; Phiodorov, S. (Вопросы атомной науки и техники, 2000)
    The results of reactive ion-plasma etching of TiN coatings from a surface of the tool in a beam-plasma system are submitted. The researches were made on the industrial set-up of a type «the Plasma boiler» with a magnetic ...